Features:
- Manual stage assembly is available with additional preload slide for easy loading and unloading of wafers or samples.
- Manual control of platen and chuck Z-position with coarse and fine adjustments.
- Smooth cast steel platen holds up to 10 magnetic or vacuum-based positioners.
- Coaxial and Triaxial chucks as well as enclosures are available for low leakage current testing.
- Standard boom mount assembly for full-range XYZ positioning of microscope.
- Available high-resolution micropositioners with 80TPI screws for μm-level positioning of probes
- RF options available include customizable RF probes, RF chuck, and shielding enclosures.