Standard Mask Aligner (SA Series)
- Top sided alignment system.
- Dual CCD alignment
- Pneumatic microscope handler (option)
- Wafer size: 4″, 6″, 8″
- Lamp Power: 350W, 500W, 1000W
- Spectrum: NUV (300nm-400nm)
- High quality exposure optics
- Wedge Error Compensation (WEC)
- Alignment accuracy 1um
- Touch panel control (option)
- Chuck mask holder adjustment:10mm
- Precise gap setting
Double Sided Mask Aligner (DA Series)
- Double sided alignment system
- CCD Bottom side align (standard)
- IR bottom side align (option)
- Wafer size: 4″, 6″, 8″
- Lamp Power: 350W, 500W, 1000W
- Spectrum: NUV (300nm-400nm)
- High quality exposure optics
- Wedge Error Compensation (WEC)
- Alignment accuracy 1um
- Touch panel control (option)
- Chuck mask holder adjustment:10mm
- Precise gap setting
Mask Aligner (EZA Series)
- Suitable for academic customer
- Suitable for budget limited customer
- Desktop, no anti-vibration table
- Wafer size: 4″
- Lamp Power: 350W
- Spectrum: NUV (300nm-400nm)
- High quality exposure optics
- Wedge Error Compensation (WEC)
- Alignment accuracy 2um
- Chuck mask holder adjustment:10mm
- Precise gap setting